Published:Journal of Chromatographic Science,
ISSN 0021-9665Volume 41, Number 7, August 2003, pp. 367-370
Measurement of As, P, and S in the Waste Gases and Water Emitted
from Semiconductor Processes by High-Temperature Hydrogen Reduction Gas Chromatography
Wen Ruimei, Deng Shouquan, Zhang Yafeng, and Fan Wei
Tongji University, Shanghai 200092, China
A quick, sensitive, and accurate method, high-temperature hydrogen
reduction gas chromatography (GC) (1,2), for measuring arsenic (As), phosphorus
(P), and sulfur (S) in the waste gases and water emitted from semiconductor
processes is proposed in this paper. A high-temperature hydrogen reduction
system that changes As, P, S, and their compounds into hydrides by atomic hydrogen
has been designed. It is convenient to detect these elements in solid, liquid,
and gaseous samples by high-temperature hydrogen reduction GC without pretreating
samples. The lower detection limits of As, P, and S by this method are 0.01,
0.003, 0.02 mg/L, respectively, and the values of relative standard deviation
are 6.2%, 8.6%, and 0.3%, respectively. Results determined by high-temperature
hydrogen reduction GC are primarily accordant to those by conventional methods
such as colorimetry and ion chromatography. The error statistics of this analysis
method also show that high-temperature hydrogen reduction GC can be successfully
used to determine trace As, P, and S in waste gases and wastewater emitted
from semiconductor processes.
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